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的研究人员已找到将EUV光源功率从目前的600瓦提升至1，000瓦的方法。　　阿斯麦负责NXE系列EUV设备的执行副总裁Teun Van Gogh表示，到本十年末，客户使用每台设备每小时可处理约330片硅晶圆，高于目前的220片。责任编辑：陈钰嘉

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